Evaluation of Pinhole Defect Density in TiN Thin Films
نویسندگان
چکیده
منابع مشابه
Effect of Defect Structure on the Optical Dispersion Properties of Thin Films of TiN*
für Naturforschung in cooperation with the Max Planck Society for the Advancement of Science under a Creative Commons Attribution 4.0 International License. Dieses Werk wurde im Jahr 2013 vom Verlag Zeitschrift für Naturforschung in Zusammenarbeit mit der Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. digitalisiert und unter folgender Lizenz veröffentlicht: Creative Commons Namen...
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ژورنال
عنوان ژورنال: Zairyo-to-Kankyo
سال: 1995
ISSN: 0917-0480,1881-9664
DOI: 10.3323/jcorr1991.44.259